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KMID : 0385519920050040359
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Analytical Science & Technology
1992 Volume.5 No. 4 p.359 ~ p.366
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Micro Raman Spectroscopic Analysis of Local Stress on Silicon Surface in Semiconductor Fabrication Process
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손민영/Son, Min Young
정재경/박진성/강성철/Jung, Jae Kyung/Park, Jin Seong/Kang, Sung Chul
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Abstract
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microstress on silicon surface, micro-Raman spectr
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KEYWORD
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